| 摘要 |
PURPOSE:To obtain a fine adjustable stage wide in moving range and high in accuracy by using a connecting member having small rigidity against the bending deformation and large rigidity against the compression/tension to connect between a base and the face which is not opposite to the moving direction of an intermediate support stage. CONSTITUTION:An intermediate support stage 14 is attached by means of mobile stage 17 of a cube or a rectangular parallelpiped and a connecting member 9 consisting of a small diameter wire having small rigidity to the bending deformation and large rigidity to the compression/tension and set at a position adjacent to the stage 17, and opposite to a face counter to the moving direction of the stage 17. Then a base 10 is connected to a face which is not opposite to the moving direction of the stage 4 by means of the member 9. Then the stage 14 is moved and the stage 17 is also moved via the member 9. The moving directions of both stage 14 and 17 are set straight to the base 10 owing to the bending deformation of the member 9. In such a way, the fine adjustable stage wide in moving range and high in accuracy is obtained.
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