| 摘要 |
PURPOSE:To prevent infiltration of gaseous hydrogen in a pretreatment furnace and gaseous oxygen of the outdoor air into a vacuum deposition chamber of a vacuum deposition plating line, by providing a gas supplying line separately from an exhaust gas circulating line to said plating line. CONSTITUTION:A steel sheet or the like passes the pretreatment furnace 10 in which a reducing atmosphere by gaseous H2 is maintained. The gas is shut off by an inlet side sealing roll chamber 11 and the surface of the steel sheet is subjected to a vacuum deposition plating treatment in the vacuum deposition chamber 12; thereafter, the gas is shut off in an outlet side sealing roll chamber 13 and the steel sheet is taken out of the device. Inert gas chambers 15, 16 into which gaseous N2 is blown under a positive pressure are provided behind the pretreatment furnace 10 and behind the outlet side sealing roll chamber 13 to prevent the infiltration of H2 and O2 into the vacuum deposition chamber 12. The N2 supply line 9 is provided in addition to the gas circulating line consisting of a pump 1, a buffer tank 5, a boosting blower 2, and an N2 refining device to this device, by which the generation of a negative pressure in the chambers 15, 16, the infiltration of the gaseous H2 and O2 into the chamber 12 and the consequent outbreak of an explosion accident and the oxidation contamination of the surface for vapor deposition are surely prevented.
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