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发明名称
SEMICONDUCTOR DEVICE TESTER
摘要
申请公布号
JPS63144532(A)
申请公布日期
1988.06.16
申请号
JP19860286883
申请日期
1986.12.03
申请人
BIYUU ENG INC;MARINE INSTR CO LTD
发明人
TSUSHIYAA KOTOHARI;BARERII RIUDOJIUSU;KAMIHARASHI TAKASHI
分类号
H01L21/66;H01L21/60
主分类号
H01L21/66
代理机构
代理人
主权项
地址
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