| 摘要 |
PURPOSE:To enable an impure gas blown off from an electrode to an operating gas to be decreased, a variation of a X-ray strength decreased, and repeatability of the X-ray strength improved by directly cooling the electrode in a plasma X-ray source operated with a gas filled into a discharge tube. CONSTITUTION:A short circuit of a switch 6 causes an increase of a voltage between electrodes, first a discharge begins on an insulation material 3 surface, and plasma is generated. The plasma moves toward electrode open ends parallel to electrodes in a space put between both electrodes receiving a Lorentz's force, pinches by a magnetic field pressure when passed electrode ends, and radiates a soft X-ray with a spot of a high temperature plasma compressed in a high density formed on an tip axis of the inside electrode 1. The electrode is cooled directly by flowing a pure water in water-cooled pipes 8, 8', 9, and 9', a temperature on the electrode surface exceeding 200 deg.C can be reduced under 100 deg.C when not cooled in an operation. This results in a sharp decrease of an impure gas blown off in an operating gas from the electrode, an increase of a X-ray strength, and the sharp decrease of the decrease and variation of the X-ray strength.
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