| 摘要 |
PURPOSE:To prevent the occurrence of problems of vacuum leakage and water leakage in a vacuum part, by utilizing a resonator plate itself as an aperture plate, and making cooling water flow directly from the outside. CONSTITUTION:In a laser resonator having a water cooled aperture plate and a returning mirror, aperture holes are directly provided in a resonator plate 9. A cooling hole 17, which is isolated from a vacuum part and directly open to atmosphere, is penetrated through the resonator plate 9. Cooling water is made to flow through the cooling hole 17 by way of a cooling pipe 10, and the aperture part is cooled. A returning mirror 2a is directly attached to a mirror plate 13, which is provided at the outside of the resonator plate 9. A cooling hole 19 is provided in the mirror plate. The cooling water is made to flow through the hole 19, and the returning mirror 2a is cooled. Since the cooling of the aperture and the returning mirror can be performed from the side of atmosphere without relation to the vacuum part, workability in providing the cooling pipe is improved, and trouble due to vacuum leakage and water leakage can be completely prevented. |
