发明名称 PRODUCTION APPARATUS FOR SINGLE CRYSTAL
摘要 PURPOSE:To make it possible to produce a high-quality single crystal with hardly any crystal defects, by providing small opening parts in the titled wall side of a coracle for dipping in a raw material melt and smoothing the flow of a melt into the coracle. CONSTITUTION:A production apparatus for a single crystal having a crucible for containing a raw material melt or together with a liquid encapsulating agent, the lower shaft for rotatably and liftably supporting the crucible, a heating heater arranged around the crucible, the rotatable and liftable upper shaft for mounting a seed crystal at the lower end thereof, a coracle having a tilted sidewall with the caliber reducing to the bottom and a small opening part at the tip thereof and a supporting tool for liftably supporting the coracle so as to dip the titled sidewall part thereof in the raw material melt and bisect the raw material melt into the inside and outside of the coracle. In the apparatus, one or more small opening parts are provided in the titled sidewall of the coracle for dipping in the raw material melt. The raw material melt flowing from the small opening parts of the titled sidewall thereinto is partially discharged from the small opening part at the lower end by providing such a structure. Thereby the inflow of the raw material melt is smoothed to level the solid-liquid interface.
申请公布号 JPS63144192(A) 申请公布日期 1988.06.16
申请号 JP19860290549 申请日期 1986.12.08
申请人 SUMITOMO ELECTRIC IND LTD 发明人 KOTANI TOSHIHIRO;TADA KOJI
分类号 C30B27/02;C30B15/12;C30B29/40;H01L21/18 主分类号 C30B27/02
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