发明名称 FORMATION OF SOURCE MATERIAL
摘要 PURPOSE:To form a source material containing no impurity atoms with even surface area by a method wherein a sheet member provided with multiple recessions in the same size and source forming material are sealed up in an ampul and then the ampul exhausted and sealed is turned to lead the melted material into the recessions of sheet member. CONSTITUTION:Multiple recessions 13 with specified capacity are made in a carbon sheet 12 with curvature along the inner wall surface of a quartz-made ampul 11 with one end A bottomed while the carbon sheet 12 fixed on the inner wall of ampul 11 is turned to fill the inner wall of ampul 11 opposing to the carbon sheet 11 with source material 14 comprising lead, tin and tellurium weighed in specified amount at the specified composition ratio. First, the ampul 11 is exhausted and after welding the other end B, a holding bar 15 is welded to seal the ampul 11. Second, the ampul 11 led into a reactive tube 16 with the source material 14 melted is turned to be quenched after leading the source material 14 into the recessions 13 of carbon sheet 12. Finally, the ampul 11 is broken down for removing the carbon sheet 12 to be picked up by a pair of tweezers.
申请公布号 JPS63144527(A) 申请公布日期 1988.06.16
申请号 JP19860294569 申请日期 1986.12.09
申请人 FUJITSU LTD 发明人 NISHIJIMA YOSHITO;EBE KOJI
分类号 H01L21/203;H01L21/363 主分类号 H01L21/203
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