发明名称 FILM FORMING DEVICE
摘要 PURPOSE:To prevent a coating agent from creeping into an opening section at the center of a component to be coated by the back side, by forming the central section of a support stand of a soft material of a given diameter and thickness and pressurizing the soft material to be deformed in the thickness direction of the component to be coated. CONSTITUTION:With a first valve 3 connected with a vacuummizing device, and a valve 4 connected with a pressure supplying device, a component 14 to be coated is placed on a chucking component 11. When a rotating device 2 is started, the first valve 3 is opened and the component 14 to be coated is adsorbed to a support stand 5 through a hole 13 of the chucking component 11 and rotates integrally. When the number of rotation comes up to a given number, the second valve 4 is opened, and a thin wall section 11a is expanded by the pressure applied and deformed along an opening 14a of the component 14 to be coated. By dropping a coating agent 15 to effect coating in said state, the coating agent 15 is prevented from creeping into the opening 14a by back side.
申请公布号 JPS63143969(A) 申请公布日期 1988.06.16
申请号 JP19860290733 申请日期 1986.12.05
申请人 MITSUBISHI ELECTRIC CORP 发明人 SHINDO KOJI
分类号 B05C11/08;H01L21/027;H01L21/30;H01L21/68;H01L21/683 主分类号 B05C11/08
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