| 摘要 |
PURPOSE:To reduce degree of resistance change as well as embrittlement and produce diamond stable for a long period, by placing a substrate and a hot filament constituted of Re in a reaction vessel. CONSTITUTION:A substrate holder 14 holding a substrate 15 for forming diamond is provided in the lower part of a reaction vessel 11 having a gas inlet and discharge port 13 at the bottom part and a heat source 16 for heating the substrate is placed under the holder 14. An U-shaped hot filament 17 constituted of Re is provided above the substrate 15 with about 8mm interval. The substrate 15 is heated by the heat source 16 and a reaction gas containing an organic compound, e.g. methane, is then introduced from the inlet 12 into the vessel 11. Gas is discharged from the discharge port 3 to keep the interior of the vessel 11 at about 40Torr. Electric power is then supplied from a heating power source 18 to heat the filament 17 and thermally decompose the gas. Thereby the aimed diamond film is formed on the substrate 15.
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