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发明名称
VERFAHREN ZUR HERSTELLUNG SILIZIUM-DOTIERTER EPITAXIESCHICHTEN
摘要
申请公布号
DD257452(A1)
申请公布日期
1988.06.15
申请号
DD19840269429
申请日期
1984.11.13
申请人
AKADEMIE DER WISSENSCHAFTEN DER DDR,DD
发明人
TEMPELHOFF,KLAUS,DD;THIEME,TAMARA,SU;SCHMIDT,MICHAEL,DD;HAHN,VOLKER,DD
分类号
C30B25/02;C30B25/14;C30B25/18;H01L21/205;(IPC1-7):C30B25/02
主分类号
C30B25/02
代理机构
代理人
主权项
地址
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