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发明名称
RAILWAY CARRIER DEVICE FOR SEMICONDUCTOR WAFERS
摘要
申请公布号
GB2198406(A)
申请公布日期
1988.06.15
申请号
GB19870027451
申请日期
1987.11.24
申请人
* SHINKO ELECTRIC CO LTD;* SHIMIZU CONSTRUCTION CO LTD
发明人
TAKASHI * MATSUMOTO;SHIGERU * TANAKA;TSUTOMU * SHINYA;YOSHIYUKI * IWASAWA;TSUTOMU * ISHIDA;HIROSHI * HARADA;SHINTARO * KOBAYASHI;KENJI * OKAMOTO
分类号
B61B13/08;B61C11/00;H01L21/677;(IPC1-7):B61B13/06
主分类号
B61B13/08
代理机构
代理人
主权项
地址
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