发明名称 INTEGRATED CIRCUIT MEASURING APPARATUS
摘要 PURPOSE:To easily measure the high-frequency characteristic of an integrated circuit chip by installing an electric-conductive elastic material at the part where the IC chip is mounted on a fixing stand. CONSTITUTION:An IC chip 2 is put on a hollowed part at a metal case 1; an electric-conductive elastic material 3 whose coefficient of friction is big, such as an electric-conductive rubber material, is used as a stand for the IC chip 2 so as to position this IC chip 2. One end of the conductor probe 4 fixed by the metal case 1 protrudes in such a way that the end can come into contact with the surface of the IC chip 2 while the other end is connected to a high-frequency connector 10. The height of the IC chip 2 is adjusted by lowering or raising the elastic material 3 by means of a screw 5 in such a way that the surface of the IC chip 2 comes into contact with the conductor 4.
申请公布号 JPS63142648(A) 申请公布日期 1988.06.15
申请号 JP19860290002 申请日期 1986.12.04
申请人 NEC CORP 发明人 WATANABE SATORU
分类号 H01L21/66;G01R31/26 主分类号 H01L21/66
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