| 摘要 |
<p>PURPOSE:To efficiently remove silanes from a gas contg. the silanes by bringing the gas contg. silanes as the harmful components into contact with an aq. alkaline soln. of dimethyl sulfoxide. CONSTITUTION:From one to 300pts.vol. dimethyl sulfoxide is added to 100pts.vol. aq. alkaline soln. to prepare the aq. alkaline soln. of dimethyl sulfoxide. The gas contg. silanes as the harmful components is brought into contact with the aq. alkaline soln. of dimethyl sulfoxide in a conventional well-known gas-liq. contact device such as a spray tower and a packed tower. When such a process is applied, the harmful components such as silanes can be efficiently removed from the gas discharged from a semiconductor production process and contg. the harmful components as compared with the conventional process.</p> |
