| 摘要 |
A piezoelectric fan is comprised of two counter-oscillating flexible blades that are driven at resonance by a bimorph comprised of two piezoceramic bending elements. The fan is provided within the flow duct of a circulating gas laser. The operation of the piezoelectric fan serves to create a flow of a laser gas medium in a desired direction through the flow duct, thereby replenishing the gas medium between a pair of laser electrodes. The fan has no wearing elements, such as bearings, and requires no bearing lubricant resulting in the elimination of lubricant hydrocarbon and bearing particulate contamination of the laser gas medium.
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