发明名称 Method and apparatus for detection of position with correction of errors caused by errors in scale pitch
摘要 A method for detecting a position wherein a signal outputted from a position detecting scale is detected by at least two detectors, an output value of a preceding detector of these two detectors is stored anew at the time when an output value of a following detector of the two detectors comes near a scale position on which the output value of the preceding detector is once stored and becomes equal to the output value of the preceding detector, and a position detecting signal is outputted, these steps being repeated to detect the position.
申请公布号 US4751383(A) 申请公布日期 1988.06.14
申请号 US19860846519 申请日期 1986.03.31
申请人 DAINIPPON SCREEN MFG. CO., LTD. 发明人 UEYAMA, TUTOMU
分类号 G01B11/00;G01D5/244;G01D5/245;G01D5/36;(IPC1-7):H01J3/14 主分类号 G01B11/00
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