发明名称 |
Method and apparatus for detection of position with correction of errors caused by errors in scale pitch |
摘要 |
A method for detecting a position wherein a signal outputted from a position detecting scale is detected by at least two detectors, an output value of a preceding detector of these two detectors is stored anew at the time when an output value of a following detector of the two detectors comes near a scale position on which the output value of the preceding detector is once stored and becomes equal to the output value of the preceding detector, and a position detecting signal is outputted, these steps being repeated to detect the position.
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申请公布号 |
US4751383(A) |
申请公布日期 |
1988.06.14 |
申请号 |
US19860846519 |
申请日期 |
1986.03.31 |
申请人 |
DAINIPPON SCREEN MFG. CO., LTD. |
发明人 |
UEYAMA, TUTOMU |
分类号 |
G01B11/00;G01D5/244;G01D5/245;G01D5/36;(IPC1-7):H01J3/14 |
主分类号 |
G01B11/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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