发明名称 LASER MARKING EQUIPMENT
摘要 PURPOSE:To reduce the size of equipment and the space requirement by installing a laser oscillator perpendicular to the floor, arranging the supplying part of an accommodating member of IC to be marked in an upper position, arranging an accommodating part of marked IC under the supplying part, and carrying the IC by dropping. CONSTITUTION:A laser output part 1 in which an laser oscillator is installed serpendicular to the floor is arranged on a base stand 2. A stick supplying part 5 is arranged in front of and above the laser output part 1. AT one corner of it, an IC accommodating sticks 4 are vertically held, and an IC shooting part 6 is provided which drops the IC 14 one by one downward to carry it. In the middle part of the IC shooting part 6, a marking part 7 is arranged, on the sidewall of which an aperture 7a is formed. The tip of a laser beam introducing part 3 is guided to the aperture 7a, and the IC is irradiated by a laser beam through the aperture 7a. Thereby a mark is formed on the IC 14. After marking is finished, the shooting part 6 is opened by a stopper 8, and the IC 14 is dropped and carried to an IC selection part 9, which inspects whether the marking is comformable or not.
申请公布号 JPS63140553(A) 申请公布日期 1988.06.13
申请号 JP19860286591 申请日期 1986.12.03
申请人 TOSHIBA CORP 发明人 MISHIMA MASATOSHI;KANAZAWA TAKAKI
分类号 H01L21/66;H01L23/00 主分类号 H01L21/66
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