| 摘要 |
<p>PURPOSE:To facilitate fitting operation by fitting a metal seal with a screw provided directly to a member where the metal sheet is to be fitted. CONSTITUTION:A bellows 25 is provided to the upper part of a yoke 24 and connected to a bellows flange 26, and the metal seal 27 is pressed by the bellow flange 26. Then, when the metal seal 27 is incorporated in a mass flow controller, the metal seal 27 prevents gas from leaking from the fitting part of a solenoid valve 11. A thrust bearing 29 is interposed between the bellows flange 26 and a coil case 28. The metal seal 27 is in an annular groove 27' and the male screw 28' of the coil case 28 engages threadably a female screw provided to its side wall. They are clamped by a hexagonal part 28'' provided to the coil case 28.</p> |
