| 摘要 |
PURPOSE:To make it possible to compose a high level image to carry out the formation observation and the component distribution observation simultaneously at a high resolution, by combining the formation image and the component distribution image with an image processing technology. CONSTITUTION:The first step is to convert an X-ray component dis tribution image into a disguised color image. That is, the X-ray component distribution image is shown in a sheet of image responding to every remarkable component, and depending on the density of the component of the image of the sheet, it is shown in a disguised color image by converting the densities of the three primary colors. The second step is to correct the brightness of piccells in the disguised colored component distribution image by the brightness of the responding piccells of the secondary electron image. The two steps are combined to be utilized. Therefore, a scanning type electron microscope device for semiconductor observation purpose to enable the composition of a high level image in order to carry out the formation observation and the component distribution observation simultaneously at a high resolution can be obtained.
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