| 摘要 |
PURPOSE:To measure scattered light having a large angle of scattering by providing an optical system which converges light from a light source and makes it incident on a body to be measured and receiving the scattered light from the body to be measured by a cylinder body. CONSTITUTION:When a light source 2 is put in operation, the light emitted by the light source 2 is guided to a lens side by a beam splitter 5, converged by a condenser lens 4, and projected on the surface 1a of the body 1 to be measured 1. Consequently, the light is reflected by the surface 1a to generate regular reflected light and scattered light A corresponding to a pattern to be measured on the surface 1a. Then the regular reflected light is cut off by a stopper 7 and the scattered light A is reflected by the reflecting surface 6a of the cylinder body 6 and guided to the surface of an area array sensor 8 together with scattered light A passing through the peripheral part of the condenser lens 4. Consequently, the scattered light A not only from the condenser lens 4, but also having a large angle of scattering is detected.
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