| 摘要 |
PURPOSE:To achieve the labor saving, miniaturization and reduction in power consumption of a sensor, by forming a SiO2-layer between a membrane composed of a ZnO-layer and an upper electrode in a membrane form composed of a Schottky connectable metal alone or an alloy thereof. CONSTITUTION:Cr and Au are successively laminated to a glass substrate to form a lower electrode 2 and a ZnO-layer 3 in a membrane form is formed on said electrode 2. Subsequently, a SiO2-layer 4 is formed thereon in a membrane form and, further, an upper electrode 5 composed of a metal alone possible in the Schottky connection with the ZnO-layer 3 or an alloy thereof is formed on said SiO2-layer 4 in a membrane form. Then, by applying predetermined voltage between these electrodes, humidity can be measured from the change in ion conductivity through the water getting into the respective gaps between the membrane of the ZnO-layer 3, the membrane of the upper electrode 5 and the SiO2-layer 4 present therebetween. By this method, operation for drying moisture by refresh due to high temp. is not required and, since the membranes are used, the labor saving, miniaturization and reduction in power consumption of an apparatus can be achieved.
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