| 摘要 |
PURPOSE:To eliminate the retention of dust in an inspection room and to prevent the pollution of the inspection room by providing an opening to introduce a clean air from an external part to the upper part cover of the inspection room and providing a duct and an air blower to introduce the air from the inspection room up to the lower part of a device and discharge it to the outside. CONSTITUTION:A clean air to flow from a ceiling in a lower direction flows from the air vent of an upper part cover 12 into an inspection room 10, flows as shown by an arrow, and is discharged through a duct 26 toward a floor surface. By the flow of such a clean air, the dust generated in the internal part of the inspection room 10 is carried to the external part and absorbed into the floor surface. As the result, since the dust is not made retentive in the inspection room 10, the pollution of a magnetic disk 18 is prevented. |
