发明名称 SEMICONDUCTOR DEVICE
摘要 PURPOSE:To prevent an Si breaking off due to the stress in the case of cutting from occuring by a method wherein gaps are made between a cathode Al electrode and surface passivation films eliminating any overlap thereof. CONSTITUTION:Gaps 4 are made between a cathode Al electrode 1 and surface passivation films 3 along the contour of cathode pattern. Through these procedures, the cathode Al cut by cutting tool trimming can escape to the gaps 4 to prevent the cathode part as well as the surface passivation films 3 from breaking off.
申请公布号 JPS63138776(A) 申请公布日期 1988.06.10
申请号 JP19860284348 申请日期 1986.12.01
申请人 HITACHI LTD;HITACHI HARAMACHI SEMICONDUCTOR LTD 发明人 ONO MASAFUMI;SAKURADA SHUROKU;SAKAGAMI TADASHI
分类号 H01L21/82;H01L21/304;H01L29/74;H01L29/744 主分类号 H01L21/82
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