| 摘要 |
PURPOSE:To prevent the electrification of the surface of a sample at the time of analyzing the surface of the sample, to eliminate the charging shift of an analytic data, and to enhance the reliability by covering the surface of the sample with a perforated plate consisting of an electric conductive material, so as to bring it into contact with the surface. CONSTITUTION:The surface of a sample attached to a sample holder 2 is covered with a perforated plate 10 consisting of the electric conductive material and a supporting leg 12 is installed to the sample holder 2. According to such a constitution, the perforated plate 10 is grounded through the sample holder 2, therefore, at the time of analyzing the energy of an electron 8 emitted from the sample 4 attending with the irradiation of an excitation source 6, a charge generated on the surface of the sample 4 can be allowed to escape to a ground, therefore, the electrification on the surface of the sample 4 can be prevented. That is to say, since the charging shift of an analytic data can be eliminated, an exact analytic data can be obtained without necessitating a correction.
|
