| 摘要 |
PURPOSE:To permit sure measurement by depositing a thin hard film on a flat reference plate which contacts with an object to be measured in such a manner as to form rugged patterns thereon, thereby assuring the thorough contact with the object to be measured. CONSTITUTION:The imposing surface of a base body 1 consisting of ceramics such as Al2O3 is formed to a smooth and flat surface. A mask consisting of a resin or the like is then formed to the parts on the imposing surface where grooves 3 are to be formed and the thin hard film 2 of >=1,800kg/mm<2> VH consisting of TiC, TiN, etc., is deposited thereon. The mask is thereafter removed to obtain the rugged patterns having the grooved 3 thin hard film 2. The thin hard film 2 is further polished to a smooth surface. The depth D of the grooves 3 is the film thickness of the thin film 2 and can be set at a very small size at which both the width W and pitch P of the grooves 3 can be easily varied. The optimum grooves 3 may, therefore, be formed according to the size of a surface plate J and the kind and use environment of the object H to be measured.
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