| 摘要 |
PURPOSE:To enable an optimum exposure condition to be issued in an aligner by connecting between the respective control means by the use of a communication means, and sending and receiving the states and measured amounts of the respective sections as data, thereby enabling an automatic operation to enhance the operating efficiency of the system. CONSTITUTION:A title system comprises an SOR ring and an SOR ring control unit 2 for controlling the SOR, a beam monitor and a beam monitor control unit 3 for controlling the beam monitor, an aligner and control systems 4a-4e for controlling the aligner, and a communication means 5 for connecting at least part of the control units 2, 3 and the control systems 4a-4e. Data associated with the exposure is made to be sent or received through the communication means 5. It does not occur that the aligner cannot perform the exposure because of the stopping of the SOR ring during the exposure, and the self-diagnostic of the aligner is given during preparing the SOR ring. With this, the operating efficiency raises, and since the exposure time is optimized by the beam energy, the defect rate of excessive or short exposure amount decreases, whereby the reliability of the system increases.
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