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发明名称
VERFAHREN ZUM ZERSAEGEN VON KRISTALLSTAEBEN ODER -BLOECKEN VERMITTELS INNENLOCHSAEGE IN DUENNE SCHEIBEN
摘要
申请公布号
DE3640645(A1)
申请公布日期
1988.06.09
申请号
DE19863640645
申请日期
1986.11.28
申请人
WACKER-CHEMITRONIC GESELLSCHAFT FUER ELEKTRONIK-GRUNDSTOFFE MBH
发明人
BREHM,GERHARD,DR.-ING.;LANGSDORF,KARLHEINZ,DIPL.-ING.;NIEDERMEIER,JOHANN;GLAS,HANS
分类号
B24B27/06;B23D59/00;B23D59/02;B24B55/02;B28D5/00;B28D5/02;C30B33/00;(IPC1-7):H01L21/304
主分类号
B24B27/06
代理机构
代理人
主权项
地址
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