发明名称 ZENER ZAP TRIMMING APPARATUS
摘要 PURPOSE:To prevent breakdown of an aluminum wiring, by providing a resistor layer between the terminals of a Zener diode and an electrode pad for external connection. CONSTITUTION:An N<+> type resistor layer 108 is provided between the terminals of an N<+> type emitter layer 107 and a P-type base layer 105 of the Zener diode in a Zener zapping trimming apparatus and a voltage-applying aluminum electrode pad 112 for external connection. Even if a fused and cut parts 116 are yielded in an aluminum wiring 111 due to the intrusion of moisture caused by a probe 115, the effect is prevented with the layer 108. Revival of a resistor 106, which is shorted with trimming under a high temperature environment, can be prevented.
申请公布号 JPS63137454(A) 申请公布日期 1988.06.09
申请号 JP19860285099 申请日期 1986.11.28
申请人 NEC CORP 发明人 MISAKI KOICHIRO;SHIMIZU JUNZO
分类号 H01L23/52;H01L21/3205;H01L21/822;H01L27/04 主分类号 H01L23/52
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