| 摘要 |
PURPOSE:To ensure fine accuracy without loss of workability, by automatically measuring the pattern of a specified part based on reticle pattern information, comparing the result with a design value, and evaluating the result. CONSTITUTION:Pattern information 1 is analyzed 2. The result is converted into an information format for inspection and stored 3. A processing part 4 selects the measured pattern, takes the position information out of the memory 3 and sends the information to a control part 5 in a stage system. At the same time, pattern information to be measured is sent to a comparator part 11. The control part 5 controls stage movement 13 based on the information from the processing part 4. A stage 7, on which a reticle to be measured 8 is mounted, is moved. The edge of the pattern is detected 9 with laser light, and the position of the stage is measured 6. The measured value is operated 10, and the data of the sized and the position of the pattern are obtained. The obtained measured values are compared 11 with the measurment values as the preset information, and the results are displayed 12. In this constitution, the correct, fine inspection can be performed without loss of workability. |
