METHOD AND APPARATUS FOR MEASURING SURFACE PROFILES

摘要

The measuring system uses a pair of sensors (3,4) spaced along a linear scanning path (5). The sensors (3,4) are responsive to local differences in height along the scanning path (5), the detected differences pref. summated for evaluation of the surface profile. The double sensor pref. uses a pair of mechanical probes or a differential interferometer with measuring and reference beams directed onto the test surface. The double sensor is pref. positioned perpendicular to the latter.