| 摘要 |
PURPOSE:To obtain a cross pattern electrode having satisfactory linear width precision by providing the first pattern on a conductor pattern of line and space to be etched and further laminating a conductor layer through the intermediary of the second pattern. CONSTITUTION:A conductor layer 11 is formed on a substrate 12 at a fixed interval, a resist mask 14 of the first pattern is provided, an exposed conductor layer 11 is etched out of a window part 15 and the mask 14 is removed. On the said layer 11, a resist mask 17 of the second pattern is provided and a conductor layer is adhered onto a window 18 to be lifted off. In this manner, a prearranged cross pattern electrode is completed. |
