| 摘要 |
PURPOSE:To form a transparent electrode with optimum reliability at a low cost by applying a mixture of binder materials having penetrability and conductive powder materials having penetrability on a substrate or a light receiving layer and by causing it to be hardened. CONSTITUTION:A transparent electrode 5 consisting of binder materials 6 containing glass frit and having penetrability as well as consisting of conductive powders 7 having penetrability which are composed of alloys such as that of indium oxide and tin and, particle diameter of which is around 2mum-10mum is formed on a glass substrate 1. And then, a light receiving layer 3 consisting of a-Si as well as a metallic electrode 4 comprising metals such as Cr, Ti and the like are formed. The transparent electrode 5 is made by the following steps: alloy conductive powders of indium oxide and tin are mixed in the ratio of around 80-90wt% in a glass paste containing glass frit and printing of about 15mum thickness is carried out at a required part on the glass substrate 1 with a screen. After that, it is burned at a temperature of 500-600 deg.C and is hardened. Thus, the transparent electrode 5 with penetrability and conductivity as well as a favorable adhesion force is obtained.
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