| 摘要 |
PURPOSE:To perform the error-free measurement with a three-dimensional shape measuring device, by providing a driving control means for driving a device means so that a probe vertically contacts a surface to be measured. CONSTITUTION:Support means 51-61 each composed, for example, of an arm having a multiple degree of freedom, drive means M1-M5 composed, for example, of DC motors driving said support means, the probe 1 provided to the means 61, an axial tension sensor 3 for detecting the force acting on the probe 1 when the probe 1 contacts a surface to be measured and a driving control means 9 operating the inclination of the probe 1 to the surface to be measured on the basis of the force detected by the sensor 3 to drive the means M1-M5 so as to vertically contact the probe 1 with the surface to be measured are provided. In this case, since the force detected is different according to the inclination of the probe 1 to the surface to be measured, the detection value of the sensor 3 is inputted to the means 9 to calculate the inclination of the probe 1 to the surface to be measured. Then, the means M1-M5 are driven so that said inclination becomes zero.
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