INTERFEROMETER IN PARTICULAR FOR INCREMENTAL SCANNING OF VARIABLE INTERFERENCE STRUCTURES

摘要

An interferometer in which a diaphragm 3 is located between an interferometer divider 1 and a beam divider connected beyond it, and the beam passing through the diaphragm is divided in the beam divider into two partial beams, each of these beams being transferred to a discrete photoelectric detector. A first beam splitter 30 and a second beam splitter 34 positioned beyond it are disposed between the interferometer divider 1 and the beam divider. The beam split by the first beam splitter in the direction of the second beam splitter is divided in the second beam splitter into two partial beams 35,36, each of these beams falling on a linear arrangement of integrated photoelectric scanning elements 38,40 associated with it. The direction of the two lines of scanning elements are perpendicular to one another.