| 摘要 |
PURPOSE:To enable a stable and efficient laser oscillation by making the distribution of the electric potential on the surface of a main electrode uniform by providing the supply line of pulse voltage formed along the longitudinal direction of the main electrode for each main electrode. CONSTITUTION:When a switch 20 is thrown and pulse voltage is sent from a laser oscillation control circuit 21, the pulse voltage is supplied to rods 13-1-13-n through the switch 20 and a plate type conductor 19. This makes each of the rods 13-1-13-n supply the pulse voltage to a main electrode 11. Accordingly, the distribution of the electric potential on the surface of the main electrode 11 is made uniform except only the electric potential at the position where each of the rod 13-1-13-n is provided is made slightly higher. In such a uniform electric potential distribution, at first, each of the reserve electrodes 17-1-17-n, 18-1-18-n is discharged for preliminary ionization and then, a uniform state glow discharge is carried out between the main electrodes 11, 12. A gas laser medium is excited by the glow discharge and the energy is oscillated as laser light. |
