| 摘要 |
PURPOSE:To shorten the working time and at the same time to improve the numerical simulation accuracy by displaying the values of various evaluation functions together with a coordinate grating diagram in the form of evaluation guidance and repeating calculations for production of a coordinate grating with reference to said display of evaluation guidance. CONSTITUTION:A distortion evaluation function calculating part 1a calculates an evaluation function showing distortions to a given coordinate grating. A pattern processing part 1b gives the graphic processing to the coordinate grating and the evaluation function value and displays them at a distortion evaluation guidance display part 1c. An analyzer decides based on said guidance whether the correction is required or not for the unit grating aspet ratio. If so, the correction data is supplied as necessary through an input setting part 1d for the coordinate lines to be erased or inserting sections and the number of pieces of coordinates to be inserted, etc. The coordinate grating corrected by means of said input correction data is displayed at a corrected coordinate grating display part 1f. The analyzer looks at the display to confirm that the correcting job is correctly carried out and sets an optimization parameter. Thus the optimization processing is carried out with the corrected coordinate grating used as an initial grating.
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