| 摘要 |
PURPOSE:To enable the easy separation without mutual strong bonding and the good surface smoothness without deformation of piezoelectric ceramic thin plates after burning by using zirconium oxide powder for scattering between green sheets. CONSTITUTION:A green sheet is formed on a film by a tape casting method after deairing a slurry state of a mixture of an oxide such as PbO, ZrO2, TiO2, Nb2O5 or Sb2O3, a solvent, a dispersant and a plasticizer. When a plurality of the obtained green sheets are laminated and burned, the burning is made after uniformly scattering zirconium oxide powder which is used for scattering powder and is classified according to the range of a grain size 37-88mum between green sheets. This enables the easy separation of laminated and burned ceramic thin plates and the formation of a piezoelectric ceramic thin plate which has good surface smoothness, a uniform composition and no defect. |
