| 摘要 |
<p>PURPOSE:To aim at miniaturization in a chamber, by attaching both first and second arms to each support plate for a center turning shaft and an outer turning shaft in a pantographic manner, and rotating a mount plate at a time when each arm goes back and almost the center of the mount plate is situated in a turning center of the outer turning shaft. CONSTITUTION:In the center of the bottom of a chamber 4, there is provided with the outer turning shaft 5 tightly attached to a support plate 8, while both first and second arms 1 and 2 are pantographically attached to this support plate 8, and furthermore, a wafer mount plate 3 is attached to a tip of the second arm 2 free of rotation. In a stand-by state, almost the center of the mount plate 3 accords with the center of the outer turning shaft 5, and when a center turning shaft 6 being concentrically installed with the outer turning shaft 5 is rotated, these arms 1 and 2 operate, whereby the mount plate 3 is rectilinearly moved, and when the outer turning shaft 5 is rotated, the mount plate 3 is also rotated in its optional direction.</p> |
