| 摘要 |
PURPOSE:To prevent the breakage of a work and any trouble in transport and permit the high speed operation by installing a transport rail having the lowering transport surface before a transport device and arranging an inclined air nozzle opened in the transprot direction over the transport rail, in the captioned device for the horizontal transport. CONSTITUTION:A semiconductor device 12 transported by a transporting roller 11 is transferred onto a transport rail 13 having the transport surface 13a lower than the roller transport surface 11a. When the semiconductor device 12 is transferred onto the transport rail 13, and a detector 19 operates, the roller 11 is stopped or revolved reversely, and air is jetted from an air nozzle 20 to the semiconductor device 12. Therefore, the semiconductor device 12 is pushed forward, and a negative pressure is generated before the semiconductor device 12. Therefore, the semiconductor device 12 is transported at a high speed and separated from the succeeding semiconductor device 12. Further, since the transport surface 13a is at a low position, the trouble in transport due to the entanglement of the frame burr 12a in the semiconductor device 12 can be prevented.
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