发明名称 Multilayer ceramics from silicate esters
摘要 This invention relates to materials produced by diluting in a solvent a preceramic mixture of a partially hydrolyzed silicate ester which is applied to a substrate and ceramified by heating. One or more ceramic coatings containing silicon carbon, silicon nitrogen, or silicon carbon nitrogen can be applied over the ceramified SiO2 coating. A CVD or PECVD top coating can be applied for further protection. The invention is particularly useful for coating electronic devices.
申请公布号 US4749631(A) 申请公布日期 1988.06.07
申请号 US19860938679 申请日期 1986.12.04
申请人 DOW CORNING CORPORATION 发明人 HALUSKA, LOREN A.;MICHAEL, KEITH W.;TARHAY, LEO
分类号 H01L21/312;C04B41/50;C04B41/52;H01L21/314;H01L21/316;H01L21/56;H01L23/29;H01L23/31;H05K3/46;(IPC1-7):B05D3/06 主分类号 H01L21/312
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