PRODUCTION OF TIN OXIDE FILM

摘要

PURPOSE:To deposit a uniform tin oxide film at a low temp. on the surface of a substrate having a complex shape by bringing the substrate into contact with a treating soln. contg. tin oxide in a supersatd. state and further contg. tin and fluorine. CONSTITUTION:Tin and fluorine are added to a treating soln. contg. tin oxide in a supersatd. state. A substrate is brought into contact with the treating soln. by immersion or other method and a tin oxide film is uniformly deposited on the surface of the substrate. The treating soln. may be prepd. by dissolving SnO in an aq. hydrofluoric acid soln. to a satd. state and adding a metallic oxide such as ZnO, a metallic hydroxide such as Al(OH)3 or a metallic chloride such as AlCl3 or SnCl4 so as to attain the supersatd. SnO state. By this method, a tin oxide film can be easily formed on the substrate of plastics or the like without carrying out heating operation.