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发明名称
摘要
申请公布号
JPS6327848(B2)
申请公布日期
1988.06.06
申请号
JP19780164025
申请日期
1978.12.25
申请人
FUJITSU LTD
发明人
NAKAMURA MORITAKA;TODA KAZUO
分类号
H01L21/302;H01L21/30
主分类号
H01L21/302
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