| 摘要 |
PURPOSE:To rapidly and accurately position a carriage by providing rails for guiding rolling wheels for the carriage, and an attenuator between fixing units for fixing the rails, thereby suppressing the vibration of the carriage. CONSTITUTION:A carriage 11 for movably supporting an object to be positioned is supported by two upper and four lower rolling wheels 3 of total six, and linearly moves longitudinally of rails 5 when the wheels 3 roll on the rails 5. The upper wheels 3 are pressed by leaf springs 4 to the rails 5. The carriage 1 is connected to a voice coil 2, driven by a magnetic force, and the rails 5 are fixedly supported by fixing units 6. In this case, thin plates coated with a viscoelastic material are laminated and inserted as an attenuator 7 between the units 6 and the rails 5. Thus, the lateral vibrations of the carriage 1 in the moving direction can be reduced.
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