发明名称 LIGHT SOURCE FOR PHOTOPROCESSING EQUIPMENT AND ITS USAGE
摘要 PURPOSE:To increase light emitting intensity and to prevent a drop in the life by narrowing the inner diameter of a light emitting part, and forming a buffer space between the light emitting part and an electrode. CONSTITUTION:Buffer spaces 23, 23' are formed between electrodes 3, 3' and a light emitting part 2 in a quartz bulb 21. The mercury vapor pressure inside the bulb 21 is made constant by utilizing the buffer spaces 23, 23'. Thereby, even if the temperature inside the bulb 21 is raised to 75-400 deg.C, light having a wavelength of 185nm is efficiently emitted. By throttles 26 formed between buffer spaces 23, 23' and spaces 22, 22' for electrodes 3, 3', ions having high energy in the light emitting part decrease the energy. Thereby, the light intensity of ultraviolet rays having a wavelength of 185 nm is increased and a drop in the life is prevented.
申请公布号 JPS63133444(A) 申请公布日期 1988.06.06
申请号 JP19860281044 申请日期 1986.11.25
申请人 SEMICONDUCTOR ENERGY LAB CO LTD 发明人 YAMAZAKI SHUNPEI
分类号 C23C16/48;H01J61/30;H01J61/72 主分类号 C23C16/48
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