| 摘要 |
PURPOSE:To accurately take a measurement by an interferometer by providing a beam between the centers of two plane thin leaf spring formed having milled thereon shape slots, supporting a mirror at one end of the beam, and reducing the inclination and play of the mirror. CONSTITUTION:Two plane thin leaf spring materials which each have three milled open end type slots form leaf spring 100 and 101. Those spring 100 and 101 are coupled with the hollow rectangular beam 102 in their centers. Then a frame 103 hold end parts of the springs 100 and 101 so that when the beam 102 is moved, the centers of the springs 100 and 101 move equally. The mirror 104 is fitted to the center of the spring 100 so as to move together with the beam 102. Consequently, the beam 102 has neither an inclination nor play that the mirror 102 senses.
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