| 摘要 |
PURPOSE:To irradiate a wiring pattern on a ceramic substrate from a low angle and to emphasize the brightness and darkness of the substrate and the wiring pattern due to a cause of the step of the substrate and the wiring pattern or the like by adjusting an irradiation angle to the object to be image picked up of a light emitting means disposed on the outer peripheral ring of the lens system of a camera part. CONSTITUTION:A light irradiates the object 2 to be image picked up constituted of the ceramic substrate 1 of the object to be image picked up and the Ag/Pd wiring pattern 2a by an illumination part 10 and the image of the mark (Ag/Pd wiring pattern) at a center position P is converted through a lens system 4 and formed on the image pickup element 5a of the camera part 5. Then, the form of this image is transformed to an electric signal in a signal processing part 5b and displayed on the monitor screen of a display part 9 through a CPU part 8. Further, according to the state of the monitor screen of the display part 9, the holding part for holding the illumination part 10 is operated to adjust a space between the object 2 to be image picked up and the illumination part 10 so as to most effectively reflect the form of the mark and the irradiation angle to the object 2 to be image picked up is adjusted along the optical axis of the lens system 4. By setting an illumination condition, the CPU part 8 can detect the mark position form.
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