| 摘要 |
PURPOSE:To detect the position shift, etc., of a chip component at a high speed with high accuracy by projecting two parallel slit light beams and a slit light beam which crosses those parallel slit light beams on a printed board surface almost at right angles slantingly from above. CONSTITUTION:Light source parts 2-4 irradiates the top surface of a printed board P with the slit light beams 2a-4a slantingly above. The light beams 2a and 3a are parallel and crosses the light beam 4a on the board P almost at right angles. A CPU circuit 6 moves the light sources 2-4 to move the light beams 2a-4a to specific positions. At the specific positions, a chip component mounted on the board P is positioned at the intersection part of the light beams 2a-4a. A slit pattern formed when the component C is irradiated with the light beams 2a-4a is picked up by an image pickup part 5. An image signal outputted by the image pickup part 5 is inputted to an image memory circuit 12. The circuit 6 detects the edge part and terminal point of the component from the data inputted to the circuit 12. Therefore, the position shift of the component C can be detected from the difference between preset reference coordinates and the detected position coordinates.
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