发明名称 THERMAL SHOCK TESTER
摘要 PURPOSE:To achieve miniaturization of the apparatus, by preparing a humidifying steam in a steam generator set outside the apparatus. CONSTITUTION:A low temperature air is generated in a low temperature tank 3, a high temperature air in a high temperature tank 2 and, furthermore, a high pressure steam with a steam generator 19. During a low temperature test, a low temperature damper 18 is opened and low temperature air in the low temperature tank 3 is sent into a test chamber 1 to cool a sample. Upon the end of a low temperature test, the damper 18 is closed to put the low temperature tank 3 into a precooling operation again. Then, a normal temperature damper 7 is opened to expose the inside of the test chamber 1 to the outside air. During a high temperature test, a high temperature damper 12 is opened and a high temperature air is sent into the test chamber 1 to heat the sample. At the same time, an electromagnetic value 28 is opened and a high pressure steam of the steam generator 19 is sprayed into the high temperature tank 2 from a spray tube 21. Thus, a high humidity/high temperature air is sent to expose the sample to a high humidity.
申请公布号 JPS63133038(A) 申请公布日期 1988.06.04
申请号 JP19860279573 申请日期 1986.11.26
申请人 HITACHI LTD 发明人 KATSUMATA NAOTO;FUKUSHIRO TAKESHI
分类号 H01L21/66;G01N3/60;G01N17/00 主分类号 H01L21/66
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