| 摘要 |
PURPOSE:To largely improve the productivity of a semiconductor treating apparatus by providing a sensor for detecting the diameter of a wafer to automatically regulate a carrier retainer, a conveyor in coincidence with the diameter of the wafer on the basis of the detection signal of the sensor, thereby eliminating the stop of the apparatus. CONSTITUTION:A sensor 10 for detecting the diameter of a wafer 3 is provided at a part of a carrier retainer 6, and a controller 11 for controlling the interval of the retainer 6, and the coincidence of a conveyor and a control program with the diameter of the wafer on the basis of the detection signal of the sensor 10 is provided. Thus, the retainer 6, the conveyor can be automatically regulated in coincidence with the diameter of the wafer 3 by the controller, the apparatus is not necessarily stopped to improve the productivity. Since manual adjustment is not executed, it can prevents dusts from being generated.
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