| 摘要 |
An apparatus for loading and unloading semi-conductor wafers comprises two spatulas 32, 34 which are supported by a mechanism 14, 18, 24, 26, 28, 30 which makes it possible to displace them horizontally and vertically in order to transport wafers between storage cassettes 38, 40 and a gripping position in a processing machine which is supplied by the apparatus. During their transfer, the wafers pass via an alignment station 44 in which they are rotated in order to give them a predetermined orientation. <IMAGE>
|
