| 摘要 |
PURPOSE:To obtain the reproducibility of a position stabilized at all times by scanning the recognition mark provided on a loading base loading the body to be worked and correcting the projecting position by detecting the dislocation of the projecting position of a laser light from the dislocation of this recognition mark. CONSTITUTION:The laser light 21 projected from the laser light source 1 for working is made incident on a beam positioner 3, condensed by a condensing lens 4 via a Y axial scanner mirror 32 and condensed on the body 8 to be worked on a loading base 7. On the other hand, the reflection light 22 from the projection position of the laser light 21 is made incident on a photoelectric conversion device 9. At this time not only the work point of the body 8 to the worked but also three recognition marks located on the right angled corner of the loading base 7 are imaged on the optical detecting face of the transducing device 9. The output from the device 9 is inputted to a preprocessing part 10 for removing the noise caused from this output and making it bivalent by comparing this output with a reference signal. A control part 11 performs the positional control of both axes XY via a driving part 12, performing the processing of the data made bivalent fed from the preprocessing part 10, the calculation of the correction amt. of the position, etc. |
